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Measurement of wafer front end silicon wafer dust particle

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Measurement of wafer front end silicon wafer dust particle

Product Introduction

Technical Advantages

Product Specifications

ModelJY-N05
Maximum panel size8-12英寸
Minimum detection accuracy0.5um
Defect CharacteristicsParticles of dust, impurities, etc.
ApplicationsWafer lithography front lane
Profile Login FormatAOI/VRS/AVI/or otherequipment
Power supply220VAC,3500W
Air pressure85-115PSI(6-8kgf/cm2)
Mainframe weight2000Kg
Total sizeL1.75*W1.4*H1.4m


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